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ComponentsMixing chamberThe process gas will be mixed into the plasma jet by a special mixing chamber. The mass flow of process gas will be controlled by a Coriolis flow meter. In this way, a measurement of the mass flow is independent of the composition of the gas. An emergency cooling is installed which prevents damages in the case of loss of the main cooling of the plasma stage. ReactorIn order to achieve a complete destruction a high temperature reactor is installed behind the mixing chamber. This reactor is made out of a chemically and thermally highly resistant material.
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